Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-01-09
2008-05-27
Chapman, Mark A (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S327000, C430S330000, C430S014000, C430S018000
Reexamination Certificate
active
07378222
ABSTRACT:
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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Orsula George W.
Thackeray James W.
Chapman Mark A
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Frickey Darryl P.
Shipley Company L.L.C.
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