Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-10-16
2007-10-16
Nguyen, Cuong (Department: 2811)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S694000
Reexamination Certificate
active
11216914
ABSTRACT:
The invention pertains to films comprising silicon, oxygen and carbon and the use of the films in integrated circuit technology, such as capacitor constructions, DRAM constructions, semiconductive material assemblies, etching processes, and methods for forming capacitors, DRAMs and semiconductive material assemblies. One particular disclosed film is an anti-reflective coating, and a method of formation thereof.
REFERENCES:
patent: 5245193 (1993-09-01), Nakanishi
patent: 5286344 (1994-02-01), Blalock et al.
patent: 5302366 (1994-04-01), Schuette et al.
patent: 5438025 (1995-08-01), Leung et al.
patent: 5441901 (1995-08-01), Candelaria
patent: 5471418 (1995-11-01), Tanigawa
patent: 5472488 (1995-12-01), Allman
patent: 5563102 (1996-10-01), Michael
patent: 5716891 (1998-02-01), Kodama
patent: 5886368 (1999-03-01), Forbes et al.
patent: 5933760 (1999-08-01), Iyer et al.
patent: 5976991 (1999-11-01), Laxman et al.
patent: 6071807 (2000-06-01), Watanabe et al.
patent: 6251802 (2001-06-01), Moore et al.
patent: 6350704 (2002-02-01), Ahn et al.
patent: 7030008 (2006-04-01), Allen et al.
patent: 7172969 (2007-02-01), Xia et al.
patent: 7192836 (2007-03-01), Ghaemmaghami et al.
Research Disclosure 408124, “Combined Oxide and Nitride Spacer Deposition by Using Two Liquid Sources at One Low Temperature in Single Furnance,” Apr. 1998 (1 page).
Moore John T.
Weimer Ronald A.
Micro)n Technology, Inc.
Nguyen Cuong
TraskBritt PC
LandOfFree
Anti-reflective coating doped with carbon for use in... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Anti-reflective coating doped with carbon for use in..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Anti-reflective coating doped with carbon for use in... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3855133