Anti-drift device for side entry electron microscope specimen ho

Details Anti-drift device for side entry electron microscope specimen ho Anti-drift device for side entry electron microscope specimen ho

1986-04-07

1987-10-27

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504431, H01J 3720

Patent

active

047031816

ABSTRACT:
A device interposed between an electron microscope specimen holder and a microscope translation stage constructed of a special combination of materials arranged in such a manner that little or no specimen drift occurs when the temperature of the complete assembly is changed. In the first and more common arrangement, the device is placed in the nose of the standard microscope specimen holder and consists of a silica rod inside a metal tube, the material of the tube having a larger coefficient of thermal expansion than the material of the specimen rod. In the second, and less common arrangement the device is placed on the opposite side of the specimen away from the nose of the holder and consists of one tube, the material of which must have a larger coefficient of thermal expansion than the material of the specimen holder.

REFERENCES:
patent: 3896314 (1975-07-01), Nukui et al.
patent: 4591722 (1986-05-01), Biddlecombe et al.

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