Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-04-12
2011-04-12
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07924397
ABSTRACT:
Disclosed is an objective lens adapted for use in liquid immersion photolithography and a method for making such a lens. In one example, the objective lens has multiple lens elements, one of which includes a transparent substrate and a layer of anti-corrosion coating (ACC). The ACC is formed proximate to the transparent substrate and is positioned between a liquid used during the liquid immersion photolithography and the transparent substrate to protect the transparent substrate from the liquid.
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Translation of Suzuki (JP-A-2000-131503).
Translation of DE-3537626.
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Lin Burn Jeng
Lu David
Haynes and Boone LLP
Kim Peter B
Taiwan Semiconductor Manufacturing Company , Ltd.
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