Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Treating process fluid by means other than agitation or...
Reexamination Certificate
2005-04-05
2005-04-05
Koehler, Robert R. (Department: 1775)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Treating process fluid by means other than agitation or...
C204S232000, C204S240000, C204S242000, C204S252000, C204S263000, C204S264000, C204S266000, C204S282000, C204S295000, C204S296000, C205S799000
Reexamination Certificate
active
06875331
ABSTRACT:
Embodiments of the invention generally provide an electrochemical plating cell having a cell body configured to contain a plating solution therein. An anode assembly is immersed in a fluid solution contained in the cell body, the anode being positioned in an anode compartment of the cell body. A cathode assembly is positioned in a cathode compartment of the cell body, and a multilevel diffusion differentiated permeable membrane is positioned between the anode compartment and the cathode compartment. The multilevel diffusion differentiated permeable membrane is generally configured to separate the anode compartment from the cathode compartment, while allowing a fluid solution to flow therethrough in a direction from the anode compartment towards the cathode compartment.
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Applied Materials Inc.
Koehler Robert R.
Moser Patterson & Sheridan
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