Anode impedance control through electrolyte flow control

Details Anode impedance control through electrolyte flow control Anode impedance control through electrolyte flow control

2005-02-15

2005-02-15

Bell, Bruce F. (Department: 1746)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S297010, C204S297080, C204S199000, C204S212000, C204S213000, C204S22400M, C204S232000, C204S237000, C204S275100, C204S286100, C204S287000, C205S292000

Reexamination Certificate

active

06855235

ABSTRACT:
Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned above the electrolyte container, the head assembly being configured to support a substrate during an electrochemical plating process, and an anode assembly positioned in a lower portion of the electrolyte container. The anode assembly generally includes a copper member having a substantially planar upper surface, at least one groove formed into the substantially planar upper surface, each of the at least one grooves originating in a central portion of the substantially planar anode surface and terminating at a position proximate a perimeter of the substantially planar upper surface, and at least one fluid outlet positioned at a perimeter of the substantially planar upper anode surface.

REFERENCES:
patent: 4698546 (1987-10-01), Maitland et al.
patent: 6126798 (2000-10-01), Reid et al.
patent: 6139384 (2000-10-01), DeTemple et al.
patent: 6217725 (2001-04-01), Van Anglen et al.
patent: 6261433 (2001-07-01), Landau
patent: 6416647 (2002-07-01), Dordi et al.
patent: 6521102 (2003-02-01), Dordi
patent: 6576110 (2003-06-01), Maydan
patent: 6613214 (2003-09-01), Dordi et al.
patent: 20010040099 (2001-11-01), Pedersen et al.
patent: 05-306493 (1993-11-01), None
patent: 2036258 (1995-05-01), None
patent: WO0163018 (2001-08-01), None

Affiliated with

Also associated with

No associations

Rating

Anode impedance control through electrolyte flow control does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Anode impedance control through electrolyte flow control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Anode impedance control through electrolyte flow control will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3473779