Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-11-29
2005-11-29
Nguyen, Tuan H. (Department: 2813)
Semiconductor device manufacturing: process
With measuring or testing
C438S017000, C324S754090
Reexamination Certificate
active
06969622
ABSTRACT:
An anisotropically conductive connector, by which positioning, and holding and fixing to a wafer to be inspected can be conducted with ease even when the wafer has a large area, contains a frame plate having a plurality of anisotropically conductive film-arranging holes formed corresponding to regions of electrodes to be inspected of a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes and supported by the inner peripheral edge thereabout.
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Inoue Kazuo
Kokubo Terukazu
Naoi Masaya
Seno Koji
JSR Corporation
Nguyen Tuan H.
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