Anisotropic etching of aluminum

Details Anisotropic etching of aluminum Anisotropic etching of aluminum

1982-03-25

1983-01-25

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156656, 1566591, 156665, 204192E, 252 791, C23F 102

Patent

active

043701965

ABSTRACT:
A method of anisotropic etching of aluminum or an alloy thereof comprising using as the etch gas a mixture of boron trichloride, trichloromethane and hydrogen. The etchant mixture advantageously also contains nitrogen and helium.

REFERENCES:
patent: 4256534 (1981-03-01), Levinstein
Vossen, Pure & Applied Chemistry, vol. 52, pp. 1759-1765 (1980).
Abstract No. 288 from Electrochemical Society Extended Abstracts, vol. 81 (2), pp. 703-705 (1981) by Bruce et al.

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