Angular rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using wave or beam motion

Reexamination Certificate

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Reexamination Certificate

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07900512

ABSTRACT:
An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

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Office Action dated Jul. 21, 2009 from German Patent Office in corresponding DE application No. 10 2007 034 759.8-54 (and English translation).

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