Anchorless electrostatically activated micro...

Details Anchorless electrostatically activated micro... Anchorless electrostatically activated micro...

2005-04-19

2005-04-19

Pascal, Robert (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000, C200S181000

Reexamination Certificate

active

06882256

ABSTRACT:
A micro electromechanical system (MEMS) switch (10) includes a substrate (12) and a stress free beam (14) disposed above the substrate (12). The stress free beam (14) is provided within first and second platforms (16, 18) to limit displacement of the stress free beam (14) in directions that are not substantially parallel to the substrate (12). A set of one or more control pads (20) is disposed in a vicinity of a first lengthwise side (22) of the stress free beam (14) for creating a potential on the first lengthwise side (22) of the stress free beam (14). The stress free beam (14) is displaceable in directions substantially parallel to the substrate (12) in accordance with the potential for providing a signal path.

REFERENCES:
patent: 6143997 (2000-11-01), Feng et al.
patent: 6218911 (2001-04-01), Kong et al.
patent: 6294847 (2001-09-01), De Los Santos
patent: 6489857 (2002-12-01), Petrarca et al.
patent: 6639488 (2003-10-01), Deligianni et al.
patent: 20020136485 (2002-09-01), Reed et al.
patent: 20030090350 (2003-05-01), Feng et al.
patent: WO 0239472 (2002-05-01), None
patent: WO 2004046019 (2004-06-01), None

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