Analyzing apparatus capable of analyzing a surface at a high res

Details Analyzing apparatus capable of analyzing a surface at a high res Analyzing apparatus capable of analyzing a surface at a high res

1984-08-09

1985-12-31

Smith, Alfred E.

Radiant energy

Electron energy analysis

250310, H01J 37252

Patent

active

045623520

ABSTRACT:
In an analyzing apparatus for use in analyzing a surface of an object by the use of Auger electrons resulting from impingement of an electron beam, outer and inner cylindrical electrode members are placed to define outer and inner rooms, respectively, and have a common cylindrical axis. The outer and the inner rooms have first outer and first inner ends adjacent to the object, respectively, and second outer and second inner ends remote from the object, respectively. An electron gun is operable to radiate the electron beam and is entered at least partly in the outer room with an electron gun axis noncoincident with the common cylinder axis. The electron gun axis and the common cylinder axis form a predetermined angle. An ion gun is also entered at least partly in the outer room with an ion gun axis noncoincident with the electron gun axis. Various kinds of detectors may be placed in the inner room.

REFERENCES:
patent: 4100409 (1978-07-01), Brongersma
patent: 4205226 (1980-05-01), Gerlach

Affiliated with

Also associated with

Rating

Analyzing apparatus capable of analyzing a surface at a high res does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Analyzing apparatus capable of analyzing a surface at a high res, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Analyzing apparatus capable of analyzing a surface at a high res will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1026161