Analytical method of auger electron spectroscopy for insulating

Details Analytical method of auger electron spectroscopy for insulating Analytical method of auger electron spectroscopy for insulating

1997-08-28

1999-03-30

Anderson, Bruce

Radiant energy

Electron energy analysis

250307, H01J 3700

Patent

active

058892826

ABSTRACT:
A method of Auger Electron Spectroscopic (AES) analysis for a surface of an insulating sample. The method is characterized by performing an AES analysis after depositing a conductive layer of a designated thickness on the surface of a sample containing an insulating layer by means of an ion beam sputtering for the purpose of the preventing charge accumulation. The conductive layer preferably is deposited to have a thickness of at least 6 .ANG. to 50 .ANG. and a beam voltage used for applying the conductive layer is at least 3 Kev. The conductive layer is made of any of iridium(Ir), chrome(Cr) and gold(Au). Because any electron charge generated on the sample is discharged via the conductive layer, the AES analysis can be performed for a sample containing an insulating layer.

REFERENCES:
patent: 4563368 (1986-01-01), Tihanyi et al.
patent: 4992661 (1991-02-01), Tamura et al.
patent: 5510614 (1996-04-01), Mitsuya et al.

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