Analytical electron microscope and a method of operating such an

Details Analytical electron microscope and a method of operating such an Analytical electron microscope and a method of operating such an

1993-07-23

1994-09-27

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 250307, H01J 3726, G01N 2300

Patent

active

053509218

ABSTRACT:
An analytical electron microscope automatically identifies objects in a sample on the basis of shape of the object, change of thickness of the object and/or change of element (such as change of element type or concentration). Therefore, the operator of the analytical electron microscope can specify a desired object, and an example or examples of that object in a sample can be identified automatically. The characteristics need to identify the object are determined by detecting the effect of the sample on the electron beam of the analytical electron microscope, using, for example, an energy dispersive type X-ray analyzer and an electron energy loss spectrometer. Once an example of the object has been identified, it may be analyzed further. The analytical electron microscope may also analyze a sample to identify and classify the objects present.

REFERENCES:
patent: 4851674 (1989-07-01), Kobayashi
patent: 5001350 (1991-03-01), Ohi et al.
patent: 5065020 (1991-11-01), Kanda
patent: 5084618 (1992-01-01), Ito
patent: 5118941 (1992-06-01), Larson
patent: 5144129 (1992-09-01), Kobayashi
Schneider et al,, Measurement Science and Technology, vol. 1, No. 9, Sep. 1990, pp. 887-893.

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