Analytic structure for failure analysis of semiconductor...

Details Analytic structure for failure analysis of semiconductor... Analytic structure for failure analysis of semiconductor...

2006-02-03

2009-10-06

Mai, Anh D (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S775000, C257SE23019, C257SE23145

Reexamination Certificate

active

07598615

ABSTRACT:
In an analytic structure for failure analysis of a semiconductor device, a plurality of analytic regions are arranged in regions of a semiconductor substrate. A plurality of semiconductor transistors having an array structure are arranged in each of the analytic regions. A plurality of interconnection structures connect the semiconductor transistors, each comprising multiple layered metal patterns and multiple layered plugs interposed between the multiple layered metal patterns. A first number of layers of the multiple layered metal patterns and multiple layered plugs is different in one of the analytic regions than a second number of layers of the multiple layered metal patterns and multiple layered plugs in another one of the analytic regions.

REFERENCES:
patent: 6197685 (2001-03-01), Domae et al.
patent: 6534864 (2003-03-01), Tanaka et al.
patent: 6580176 (2003-06-01), Domae et al.
patent: 6693446 (2004-02-01), Song et al.
patent: 6822330 (2004-11-01), Park et al.
patent: 7468530 (2008-12-01), Lee et al.
patent: 2003/0034558 (2003-02-01), Umemura et al.
patent: 2006/0220240 (2006-10-01), Lee et al.
patent: 11-031727 (1999-02-01), None
patent: 10-2002-0093391 (2002-12-01), None
patent: 10-2003-0009816 (2003-02-01), None

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