Analysis with electron microscope of multielement samples using

Radiant energy – Inspection of solids or liquids by charged particles – Methods

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250310, 250397, 378 45, 378 46, 378 48, G01N 23225, G01N 23223

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active

046970800

ABSTRACT:
A method and modified analytical electron microscope for determining the concentration of elements in a multielement sample by exposing samples with differing thicknesses for each element to a beam of electrons, simultaneously measuring the electron dosage and x-ray intensities for each sample of element to determine a "K.sub.AB " value to be used in the equation ##EQU1## where I is intensity and C is concentration for elements A and B, and exposing the multielement sample to determine the concentrations of the elements in the sample.

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