Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-12-04
1992-08-04
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118712, 156643, 156345, 20419233, 356316, H01L 21306, B44C 122, C23C 1400
Patent
active
051356040
ABSTRACT:
Separation of laser optogalvanic signals in plasma into two components: (1) an ionization rate change component, and (2) a photoacoustic mediated component. This separation of components may be performed even when the two components overlap in time, by measuring time-resolved laser optogalvanic signals in an rf discharge plasma as the rf frequency is varied near the electrical resonance peak of the plasma and associated driving/detecting circuits. A novel spectrometer may be constructed to make these measurements. Such a spectrometer would be useful in better understanding and controlling such processes as plasma etching and plasma deposition.
REFERENCES:
D. Kumar, et al., "Time-resolved laser optogalvanic spectroscopy of iodine in a radio frequency discharge," J. Chem. Phys., vol. 90, pp. 4008-4014 (1989).
Haner, et al., "Time-Resolved Study of the Laser Optogalvanic Effect in I.sub.2," Chem. Phys. Lett., vol. 96 (3), pp. 302-306 (1983).
Uetani, et al., "Temporal Variation of Electron Density in a Laser-Perturbed Discharge Plasma and its Relationship to the Optogralvanic Signal," Optics Comm., vol. 49 (4), pp. 258-262 (1984).
Kumar, et al., "Photoacoustics using radio-frequency laser-optogalvanic detection: a new technique for low-pressure photoacoustic spectroscopy, Magnetic predissociation of the B state of I.sub.2," Can. J. Phys., vol. 64, pp. 1107-1110 (1986).
Kumar Devendra
McGlynn Sean P.
Board of Supervisors of Louisiana State University and Agricultu
Powell William A.
Runnels John H.
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