Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Deforming the surface only
Reexamination Certificate
2008-02-01
2011-10-04
Gupta, Yogendra N (Department: 1744)
Plastic and nonmetallic article shaping or treating: processes
Mechanical shaping or molding to form or reform shaped article
Deforming the surface only
C264S496000, C264S319000, C264S338000, C977S887000
Reexamination Certificate
active
08029716
ABSTRACT:
Amorphous inorganic nitrides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy between the release layer and the cured, hardened composition. The release layer may include one or more metallic or semiconductor elements such as Al, Mn, B, Co, Ti, Ta, W and Ge.
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Houle Frances A
Jahnes Christopher V.
Raoux Simone
Rossnagel Stephen M
Gupta Yogendra N
International Business Machines - Corporation
Johnson Daniel E.
Le Ninh V
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