Amorphous metallic and nitrogen containing alloy films

Details Amorphous metallic and nitrogen containing alloy films Amorphous metallic and nitrogen containing alloy films

1977-12-30

1980-11-04

Rutledge, L. Dewayne

Metal treatment

Compositions

Heat treating

75123B, 75170, 148 3157, 428450, C04B 3500

Patent

active

042318165

ABSTRACT:
These amorphous metal-alloy films include nitrogen, greater than about one atomic percent at least one transition metal selected from Cr, Fe, Co and Ni with at least one element forming an amorphous alloy therewith, selected from the "glass forming" elements, i.e., B, Si, Al, C and P. The alloys can be formed by deposition in a vacuum chamber. When films are sputtered, the target is composed of the above alloy elements with at least one element selected from each of the transition metal and glass forming element groups. Sputtering occurs in an atmosphere above about 2% vol. N.sub.2 gas mixed with an inert gas, e.g., Ar. Alloys produced include N, i.e., (Co-Fe-B)N and (Fe-B)N. Above about 2 atomic % N in the film, films have lower values of saturation magnetization 4.pi.M.sub.s. Above a 2% vol. N.sub.2 gas in the plasma, electrical resistivity increases. Over 0.5% vol. N.sub.2 gas in the plasma, the film's effective perpendicular anisotropy field H.sub.k.sup.* increases. For (Co-Fe-B)N, the anisotropy direction moves from in plane to perpendicular above 2% vol. N.sub.2 plasmas. For (Fe-B)N, H.sub.k.sup.* increases with N.sub.2 up to 10% vol. N.sub.2 plasma. The N% in a film varies linearly with the log of N.sub.2 % vol. Films show markedly improved adhesion, corrosion resistance and hardness. Magnetic thermal stability increases with N.sub.2 above about 5% vol. N.sub.2 in a plasma. Structural and magnetic properties are stable for annealing up to 400.degree. C.

REFERENCES:
patent: 3427154 (1969-02-01), Mader et al.
patent: 3856513 (1974-12-01), Chen et al.
patent: 3965463 (1976-06-01), Chaudhari et al.
patent: 4002546 (1977-01-01), Shirahata et al.
patent: 4030892 (1977-06-01), Mendelsohn et al.
patent: 4038073 (1977-07-01), O'Handley et al.
patent: 4126287 (1978-11-01), Mendelsohn et al.
"New Non-Magnetostrictive Metallic Glasses" IEEE Transactions on Magnetics, vol. MAG-12, No. 6, pp. 942-944 (Nov. 1976), O'Handley et al.
"Incorporation of Rare Gases in Sputtered Amorphous Metal Films," J. of Vaccuum Science and Technology 14, No. 1, pp. 152-157, 156 (1977), Cuomo et al.
"Magnetic Properties to TM.sub.80 P.sub.20 Glasses," O'Handley et al., Journal of Applied Physics, vol. 48, No. 5, May 1977, p. 2095.
"Ferromagnetic Properties of Some New Metallic Glass," O'Handley et al., Applied Physics Letters, vol. 29, No. 6, Sep. 15, 1976, pp. 330-332.
"Magnetrostruction of Ferromagnetic Metallic Glass," O'Handley, Solid State Communications, vol. 21, 1977 pp. 1119-1122, Allied Chemical, Materials Research Report, Nov. 1975.

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