Ambient temperature gas sensor

Details Ambient temperature gas sensor Ambient temperature gas sensor

1994-07-26

1995-09-12

Williams, Hezron E.

Measuring and testing

Gas analysis

Detector detail

338 34, 257253, G01N 2726, H01C 1010

Patent

active

054489067

ABSTRACT:
An ambient temperature solid state sensor for detecting the concentration of a gas includes an insulating substrate, a polycrystalline semiconducting oxide thin film deposited on the substrate such that the gas can be adsorbed on the surface of the film, the film having a low carrier concentration and a high resistivity, a pair of electrodes disposed on the film for measuring the electrical resistance of the film, and a source of light having a wavelength component which is absorbed by the thin film, thereby causing photodesorption of the gas from the surface of the film and establishing the equilibrium between gaseous species in the ambient and gaseous species adsorbed on the oxide surface. The resistance of the thin film is dependent on the amount of adsorbed gas, the measured resistance of the film thereby indicating the concentration of the gas.

REFERENCES:
patent: 4001756 (1977-01-01), Heijne
patent: 4198851 (1980-04-01), Janata
patent: 4453151 (1984-06-01), Leary et al.
patent: 4481499 (1984-11-01), Arima et al.
patent: 4615772 (1986-10-01), Hetrick
patent: 4926156 (1990-05-01), Dickert et al.
Melnick, Zinc Oxide Photoconduction, an Oxygen Adsorption Process, Journal of Chemical Physics, vol. 26, p. 1136 (1957).

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