Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-12-22
1991-12-03
Hille, Rolf
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
357 71, 357 49, 427 96, H01L 3902
Patent
active
050703935
ABSTRACT:
An overcoat layer possessing an insulating property is formed only in the necessary part on a ceramic substrate formed of a sintered aluminum nitride. An aluminum nitride substrate for the formation of a thin-film conductor layer thereon is composed of the ceramic substrate and the overcoat layer both mentioned above. The overcoat layer serves the purpose of alleviating the jogging contour of the surface of the sintered aluminum nitrate and enhancing the smoothness of this surface. A semiconductor device is produced by forming a thin-film conductor layer destined to constitute a circuit part on the overcoat layer. The excellence in the surface smoothness of the overcoat layer enhances the reliability of the thin-film conductor layer in a great measure. Semiconductor elements are mounted on the exposed part of the sintered aluminum nitride where the overcoat layer is absent.
REFERENCES:
patent: 3967296 (1976-06-01), Intrator
patent: 4370421 (1983-01-01), Matsushita
patent: 4761345 (1988-08-01), Sato et al.
patent: 4886709 (1989-12-01), Sasame et al.
Nakagawa Noriko
Nakai Toshio
Yasumoto Taka-aki
Hille Rolf
Kabushiki Kaisha Toshiba
Ostrowski David
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