Aluminum nitride powder, method for producing the same and...

Chemistry of inorganic compounds – Nitrogen or compound thereof – Binary compound

Reexamination Certificate

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C501S098400

Reexamination Certificate

active

11174723

ABSTRACT:
The present invention is to produce an aluminum nitride powder which is turned into a sintered body at a temperature of not more than 1600° C., thereby obtaining a sintered aluminum nitride in which the density and thermal conductivity are high and which can be properly used as a substrate material.Using a vapor phase reaction apparatus shown in FIG.1, ammonia gas was fed from a reactor2heated at from 300 to 500° C. and maintained at that temperature by a heating section1via a feeding tube4while being regulated by a flow regulator3. At the same time, while being regulated by the flow regulator5, nitrogen gas containing an organic aluminum compound is fed via a feeding tube6to obtain an aluminum nitride powder. The aluminum nitride powder is subjected to a heat treatment at from 1100 to 1500° C. in a reducing gas atmosphere and/or an inert gas atmosphere to obtain an aggregate aluminum nitride powder. The aggregate aluminum nitride powder is subjected to a mechanical treatment to obtain an aluminum nitride powder in which the specific surface area value is not less than 30 m2/g and a ratio of an average particle diameter to a particle diameter in terms of the specific surface area is not more than 10.

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Ceramics Japan,(32), No. 6 (3 pp), no date.

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