Alignment using fiducial features

Details Alignment using fiducial features Alignment using fiducial features

2008-05-13

2008-05-13

Clark, Jasmine (Department: 2815)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having substrate registration feature

C438S462000, C438S116000, C438S064000, C438S069000

Reexamination Certificate

active

11158682

ABSTRACT:
The present invention relates to positioning components of an assembly using fiducial features. A first fiducial feature on a first piece of the assembly can be located. A first component can be positioned on the first piece of the assembly based on the location of the first fiducial feature. A second fiducial feature on a second piece of the assembly can be located. The second component can be positioned relative to the second piece of the assembly based on the location of the second fiducial feature. The first piece can be positioned relative to the second piece based on the locations of the first and second fiducial features. The assembly can be an optical device. The first component can be an active optical device, the second component can be a lens, the first piece can be a package, and the second piece can be a lid.

REFERENCES:
patent: 5337398 (1994-08-01), Benzoni et al.
patent: 5821532 (1998-10-01), Beaman et al.
patent: 6728449 (2004-04-01), Trott

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