Alignment routine for optically based tools

Details Alignment routine for optically based tools Alignment routine for optically based tools

2008-05-20

2008-05-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C382S151000, C355S077000, C430S030000

Reexamination Certificate

active

10604010

ABSTRACT:
A method is provided for using a point of interest as a starting point where an alignment is automatically selected by recognition software for a patterned substrate. The method includes disposing the patterned substrate on a stage of an exposure system, the exposure system having an alignment routine including; locating a first point of interest on the patterned substrate; scanning a first area proximate the first point of interest for a first unique feature; defining a periodicity for the patterned substrate; locating a second point of interest based on the periodicity; scanning a second area proximate the second point of interest for a second unique feature corresponding to the first unique feature; gathering alignment data from at least scanning the first and second areas; and determining substrate position relative to the exposure system from alignment data of at least the first and second scanned areas.

REFERENCES:
patent: 4327292 (1982-04-01), Wang et al.
patent: 4475122 (1984-10-01), Green
patent: 4515480 (1985-05-01), Miller et al.
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4870288 (1989-09-01), Abuku et al.
patent: 5621813 (1997-04-01), Brown et al.
patent: 5696835 (1997-12-01), Hennessey et al.
patent: 6225011 (2001-05-01), Gotoh et al.
patent: 6278957 (2001-08-01), Yasuda et al.
patent: 6347291 (2002-02-01), Berman
patent: 6528219 (2003-03-01), Conrad et al.
patent: 6801825 (2004-10-01), Utsunomiya
patent: 1124163 (2001-08-01), None

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