Alignment marks and manufacturing method for the same

Details Alignment marks and manufacturing method for the same Alignment marks and manufacturing method for the same

2006-03-07

2006-03-07

Kennedy, Jennifer (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S151000, C438S401000

Reexamination Certificate

active

07008829

ABSTRACT:
Alignment marks are formed when source and drain electrodes of a TFT are formed and thereon a thick red filter is formed. So that, the following respective color layers can be made thin on the red filter. Also, the exposure alignment laser permeates in an exposure step, and thereby the alignment marks can be accurately detected.

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