Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Patent
1997-06-12
1998-12-08
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Alignment marks
H01L 23544
Patent
active
058474684
ABSTRACT:
An alignment mark formed on a surface of substrate for aligning with a mask through an irradiation of alignment light, which comprises a step formed with a concave portion and a convex portion and a metallic film deposited along the concave portion and the convex portion. A light absorption layer is formed over at least one of the concave portion and the convex portion reflecting the step, the light absorption layer lying over the concave portion having a different thickness from that of the light absorption layer lying over the convex portion when the light absorption layer is formed over both the concave portion and the convex portion, the light absorption layer comprising a material capable of absorbing at least a portion of wavelength region of the alignment light. The light absorption layer is desirably formed in a larger thickness on the convex portion of the step as compared with that on the concave portion. Desirably, the light absorption layer is a resist capable of absorbing a portion of wavelength region of the alignment light, or a resist containing a material capable of absorbing a portion of wavelength region of the alignment light.
REFERENCES:
patent: 5308682 (1994-05-01), Morikawa
patent: 5311061 (1994-05-01), Sheck
patent: 5334466 (1994-08-01), Yasui et al.
patent: 5475268 (1995-12-01), Kawagoe et al.
patent: 5525840 (1996-06-01), Tominaga
patent: 5528372 (1996-06-01), Kawashima
patent: 5532520 (1996-07-01), Haraguchi et al.
Higashikawa Iwao
Kumagae Akitoshi
Nomura Hiroshi
Hardy David B.
Kabushiki Kaisha Toshiba
LandOfFree
Alignment mark for use in making semiconductor devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Alignment mark for use in making semiconductor devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment mark for use in making semiconductor devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-180939