Alignment detection apparatus

Details Alignment detection apparatus Alignment detection apparatus

1995-02-15

1998-04-21

Bost, Dwayne

Image analysis

Applications

Manufacturing or product inspection

382151, 36447434, 348 95, G06K 900

Patent

active

057427011

ABSTRACT:
An alignment detection apparatus is able to accurately detect the alignment condition of an upper hole and a lower hole located under the upper hole even when a scanning window does not precisely match either of the two holes. This alignment detection apparatus comprises an image producer which produces a digital density image indicative of these two holes. A position detector detects positions of the holes based on the digital image signal and produces a position signal. A displacement detector detects a distance between the upper hole and lower hole based on the position signal and produces a displacement signal indicative of the thus detected distance. Based on the displacement signal, the alignment condition of two holes including the information of how the lower hole edge is displaced from the upper hole edge can be detected.

REFERENCES:
patent: 4253112 (1981-02-01), Doemens
patent: 4555798 (1985-11-01), Broadbent, Jr.
patent: 4635293 (1987-01-01), Watanabe
patent: 4643579 (1987-02-01), Toriumi
patent: 5113565 (1992-05-01), Cipolla
patent: 5446801 (1995-08-01), Itsuzaki

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