Alignment assembly for aligning a spring element with a laser be

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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73105, G01N 2186

Patent

active

054235146

ABSTRACT:
A probe microscope has a displacement detecting system formed of a spring element and a photodetecting element, the system being attached to a fine movement element, and a holder, which attached to the spring element fixed to the photodetecting system by a magnetic force, is moved by an alignment jig removably mounted on a sample moving stage in a three-dimensional fashion and a laser beam is converged on a selected point of the spring element with ease while confirming the state of alignment of the spring element with laser light based on an image produced by a camera and displayed on a monitor.

REFERENCES:
patent: 5286977 (1994-02-01), Yokoyama et al.
patent: 5296704 (1994-03-01), Mishima et al.

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