Alignment apparatus, control method thereof, exposure...

Details Alignment apparatus, control method thereof, exposure... Alignment apparatus, control method thereof, exposure...

2003-02-27

2008-08-12

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

C356S508000

Reexamination Certificate

active

07411678

ABSTRACT:
An alignment apparatus which drives to a target position a stage capable of moving at least in a two-dimensional direction. A first measurement device and a second measurement device have a function of measuring positions of the stage in one direction from different positions, a switching device performs a switching operation for switching the first measurement device to the second measurement device, and a controller sets an initial value for the second position measurement device, which is used after the switching operation, based on the position of the stage finally measured by the first position measurement device before the switching operation.

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Japanese Office Action dated Oct. 6, 2006, issued in corresponding Japanese patent application No. 2002-056419.

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