Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1987-11-20
1988-12-27
Hix, L. T.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 53, 356400, G03B 2742, G03B 2770
Patent
active
047944269
ABSTRACT:
An apparatus for optically aligning a first mark of a substrate and a second mark of a mask formed by a member transmitting radiation therethrough and a member intercepting the radiation includes a stage for supporting the substrate thereon, moving means for two-dimensionally moving the stage, a projection optical system for projecting the pattern of the mask onto the substrate supported on the stage, mark detecting means for optically detecting the first and second marks, the mark detecting means having first application means for applying radiation to the first mark of the substrate through the mask, second application means for applying radiation to the second mark of the mask through the projection optical system, an objective optical system for forming the images of the first and second marks on a predetermined surface, and an optical member. Control means for detecting the deviation between the image of the first mark and the optical member on the basis of the first radiation detection signal to produce a first deviation detection signal, detecting the deviation between the image of the second mark and the optical member on the basis of the second radiation detection signal to produce a second deviation detection signal, and controlling the moving means on the basis of the first and second detection signals.
REFERENCES:
patent: 4402596 (1983-09-01), Kanatani
patent: 4657379 (1987-04-01), Suwa
Hix L. T,.
Nikon Corporation
Rutledge D.
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