Alignment apparatus

Details Alignment apparatus Alignment apparatus

2004-04-30

2010-06-15

Fureman, Jared J (Department: 2836)

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

Systems for magnetizing, demagnetizing, or controlling the...

Reexamination Certificate

active

07738232

ABSTRACT:
In driving a movable body in a target direction, a force in another direction, which may act on the movable body, is reduced. A system includes a current amplifier, which drives X1 and X2 electromagnets (a first actuator) for aligning the movable body in the X direction, a system including a current amplifier, which drives Y1 and Y2 electromagnets (a second actuator) for aligning the movable body in the Y direction, a subordinate direction component correction unit, which reduces a force in the Y direction acting on the movable body when driving the movable body in the X direction by the first actuator, and a subordinate direction component correction unit, which reduces a force in the X direction acting on the movable body when driving the movable body in the Y direction by the second actuator.

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Japanese Office Action dated May 14, 2007, issued in corresponding Japanese patent application No. 2003-133535, with English translation.
Japanese Office Action dated Oct. 24, 2008, issued in corresponding Japanese patent application No. 2003-133535.

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