Image analysis – Applications – Manufacturing or product inspection
Patent
1995-11-30
1998-04-07
Johns, Andrew
Image analysis
Applications
Manufacturing or product inspection
356401, G06K 900
Patent
active
057374414
ABSTRACT:
A method of aligning a substrate on which a plurality of pattern areas are to be formed in a predetermined characteristic arrangement relative to a predetermined reference point comprises the step of setting the coordinates of the arrangement on the substrate and forming at least one pair of fiducial marks at design positions asymmetrical with respect to at least one axis of the coordinates, the step of detecting the locations of the fiducial marks relative to the reference point, and the step of moving the substrate in such a direction that the relative deviation between the detected locations and the reference point becomes a predetermined value.
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Johns Andrew
Nikon Corporation
Patel Jayanti K.
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