Aligning method

Details Aligning method Aligning method

1984-11-19

1987-02-17

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

358101, G01B 1126

Patent

active

046435794

ABSTRACT:
A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.

REFERENCES:
patent: 3712740 (1973-01-01), Hennings
patent: 3843916 (1974-10-01), Trotel et al.
patent: 4301363 (1981-11-01), Suzuki et al.
patent: 4504148 (1985-03-01), Kuroki et al.
patent: 4545684 (1985-10-01), Kuroki et al.
Russell et al., Nat. Bur. Stand. (U.S.) Spec. Publ. 400-451, Apr. 1979.
Wojcik, Electron Technology, V. 10, N. 3, pp. 79-96, 1977.
Harper et al., IBM Technical Disclosure Bulletin, V. 13, N. 4, p. 1028, Sep. 1970.
Khoury et al., IBM Technical Disclosure Bulletin, V. 13, N. 3, p. 768, Aug. 1970._

Affiliated with

Also associated with

Rating

Aligning method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aligning method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aligning method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1934862