Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1998-02-25
2000-01-11
Huff, Mark F.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
526281, 526282, G03C 173, C07F 3206
Patent
active
060134135
ABSTRACT:
Alicyclic nortricyclene polymers and co-polymers suitable for deep ultraviolet microlithography applications.
REFERENCES:
patent: 4613456 (1986-09-01), Matsuno et al.
Frechet Jean M. J.
Niu Quingshan
Cornell Research Foundation Inc.
Huff Mark F.
Jacobs Bruce F.
Lee Sin J.
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