Air platen for leading edge and trailing edge control

Details Air platen for leading edge and trailing edge control Air platen for leading edge and trailing edge control

2006-03-28

2006-03-28

Rose, Robert A. (Department: 3723)

Abrading

Machine

Endless band tool

C451S307000

Reexamination Certificate

active

07018276

ABSTRACT:
An air platen assembly is described and includes a platen that has a plurality of concentric rings. Each of the rings has a plurality of openings in order to provide a cushion of air to a CMP belt. At least one of the rings extends beyond an outer edge of a wafer to be planarized by the CMP belt. A support is attached with the platen and has a plurality of air ports for pressurized air to pass to the rings of the platen. A gasket is positioned between the support and the platen and has a plurality of cutouts that align with the openings and the air ports. A base is also included and supports the support.

REFERENCES:
patent: 3099904 (1963-08-01), Bell
patent: 5558568 (1996-09-01), Talieh et al.
patent: 5593344 (1997-01-01), Weldon et al.
patent: 5722877 (1998-03-01), Meyer et al.
patent: 5800248 (1998-09-01), Pant et al.
patent: 5916012 (1999-06-01), Pant et al.
patent: 5961372 (1999-10-01), Shendon
patent: 5980368 (1999-11-01), Chang et al.
patent: 6086456 (2000-07-01), Weldon et al.
U.S. Appl. No. 09/925,254: “Platen Assembly Having a Topographically Altered Platen Surface”; Inventors: Taylor et al.; Filed: Aug. 8, 2001.

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