Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2007-08-07
2007-08-07
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S187000, C333S189000, C310S322000, C310S324000, C310S349000, C029S025350, C427S100000
Reexamination Certificate
active
10959313
ABSTRACT:
An air-gap type thin film bulk acoustic resonator (FBAR) and method for fabricating the same. Also disclosed are a filter and a duplexer employing the air-gap type FBAR. The air-gap type FBAR includes: a first substrate having a cavity part at a predetermined region on its upper surface; a dielectric film stacked on the upper part of the first substrate; a first air gap formed between the first substrate and the dielectric film; a stacked resonance part including a lower electrode/piezoelectric layer/upper electrode formed on the upper part of the dielectric film; a second substrate having a cavity part at a predetermined region on its lower surface and joined to the first substrate; and a second air gap formed between the stacked resonance part and the second substrate. A thin film of predetermined thickness made of a liquid crystal polymer (LCP) may be used as the dielectric film.
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Ha Byeoung-ju
Hwang Jun-sik
Park Yun-kwon
Song In-sang
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
Summons Barbara
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