Air filtering device and cleaning system of semiconductor...

Details Air filtering device and cleaning system of semiconductor... Air filtering device and cleaning system of semiconductor...

2011-03-29

2011-03-29

Greene, Jason M (Department: 1775)

Gas separation

With separating media bypass or system gas pressure relief

C055S410000, C055S417000, C055S418000, C055S419000, C055S385200, C055S495000, C055S497000, C055S500000, C055S502000, C055SDIG031, C454S049000, C454S067000

Reexamination Certificate

active

07914594

ABSTRACT:
An air filtering device and an air cleaning system of a semiconductor manufacturing apparatus to reduce cost and increase manufacturing productivity. The air filtering device may include a frame having an open aperture coupled to an air supply line. A buffer frame configured to be inserted into the frame may include a plurality of slot parts, each slot part having a plurality of air in/out apertures through which air may flow in or out from the buffer frame. A plurality of filters may be releasably fastened to the plurality of slot parts to filter pollution material contained in air flowing through the air in/out apertures. An air interrupter for interrupting air flowing through the air in/out apertures may be used when replacing the plurality of filters, thereby providing purified air to the semiconductor manufacturing apparatus during the replacement.

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patent: 10-211419 (1998-08-01), None
English language abstract of Japanese Publication No. 9-180974.
English language abstract of Korean Publication No. 10-211419.

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