Gas separation – Combined or convertible – In environmental air enclosure
Patent
1996-11-20
1998-08-11
Bushey, C. Scott
Gas separation
Combined or convertible
In environmental air enclosure
55415, 454187, 454298, 454333, B01D 4610, B01L 104
Patent
active
057922268
ABSTRACT:
An air current controlling device for a clean room having a high efficiency particle filter, a housing cap for the filter, and an air current directional controller provided between the filter and the housing cap. The controller has a shaft extending therefrom, which extends through a central opening in the bottom of the housing cap. The controller includes a plurality of extendable and retractable blades, each being connected to a square plate that is in turn connected to the shaft. A clean room having the above air current controlling device installed in each air inlet is capable of widely distributing the clean air in the clean room. The wide air distribution reduces the temperature difference in the clean room, while optimizing the relative humidity and thereby reducing the electrostatic level of the clean room.
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Lee Joung-Sun
Lee Kun-hyung
Mun Sang-young
Ruy Jae-jun
Bushey C. Scott
Samsung Electronics Co,. Ltd.
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