Air conditioning system for semiconductor clean room including a

Details Air conditioning system for semiconductor clean room including a Air conditioning system for semiconductor clean room including a

1997-07-23

1999-04-06

Doerrler, William

Refrigeration

Processes

Deodorizing, antisepticizing or providing special atmosphere

62 92, 454187, F24F 316, F25D 1706, B01L 104

Patent

active

058903674

ABSTRACT:
An air conditioning system for a semiconductor clean room includes a chemical filter between an air conditioner including a humidifier and a ULPA filter of the clean room, for ionizing chemical impurities using moisture supplied from the humidifier and then adsorbing the ionized chemical impurities by using the chemical filter. The chemical filter is installed downstream of the humidifier, which applies phosphoric acid for the prevention of scale-formation. This downstream location allows the chemical filter to prevent the phosphoric acid from being included in the fresh air as a new chemical impurity, which makes regulation of temperature and humidity of the air possible without having to use a special and expensive pure steam system.

REFERENCES:
patent: 5326316 (1994-07-01), Hashimoto et al.
patent: 5434644 (1995-07-01), Kitano et al.
patent: 5607647 (1997-03-01), Kinkead
patent: 5626820 (1997-05-01), Kinkead et al.

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