Bearings – Rotary bearing – Fluid bearing
Reexamination Certificate
2007-05-22
2007-05-22
Footland, Lenard A. (Department: 3682)
Bearings
Rotary bearing
Fluid bearing
Reexamination Certificate
active
11029943
ABSTRACT:
An air bearing including a unitary, i.e., single piece, housing, which removes the need for an insert, is disclosed. The air bearing may include a shaft opening longitudinally extending through the housing for receiving the shaft; a plurality of passages that longitudinally extend into the housing for communicating a gas; a set of a plurality of nozzle seat openings, each nozzle seat opening extending from the shaft opening and intersecting one of the passages; and a nozzle positioned in each nozzle seat opening at a distance from the shaft opening for injecting the gas into the shaft opening to support the shaft. The air bearing allows for contact of the shaft to the shaft opening in the housing without damage, no leakage, and easier and more cost-effective manufacturability.
REFERENCES:
patent: 4573808 (1986-03-01), Katayama
patent: 5073037 (1991-12-01), Fujikawa et al.
Hertel Richard J.
Krampert Jeffery E.
Footland Lenard A.
Varian Semiconductor Equipment Associates Inc.
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