Advanced vacuum processor

Details Advanced vacuum processor Advanced vacuum processor

1988-05-02

1989-06-27

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156345, 204298, B44C 122, H01L 21306, C03C 1500, C03C 2506

Patent

active

048426806

ABSTRACT:
A complete integrated circuit processing module, wherein multiple processing stations, each with its own vacuum isolation, are located inside a single module which is held at hard vacuum. A wafer transport arm mechanism permits interchange of wafers among the processing stations and a load lock. The load lock is equipped to remove and replace wafers from a vacuum-sealed wafer carrier. The wafers remain face-down and under hard vacuum during all the wafer handling steps.

REFERENCES:
patent: 4483651 (1984-11-01), Nakane et al.
patent: 4547247 (1985-10-01), Warenback et al.
patent: 4659413 (1987-04-01), Davis et al.
Drytek Inc., Quad System, Brochure pp. 1-11.

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