Adjustment method and apparatus of optical system, and...

Optics: image projectors – Miscellaneous

Reexamination Certificate

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C356S601000, C359S580000

Reexamination Certificate

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07083290

ABSTRACT:
A method for adjusting an optical system that has a multilayer mirror that includes a multilayer film includes the steps of measuring wave front aberration of the optical system, determining a condition to remove part of the multilayer film in the multilayer mirror so that the wave front aberration measured in the measuring step may reduce, and removing the part of the multilayer film in the multilayer mirror based on the condition determined by the determining step.

REFERENCES:
patent: 6504896 (2003-01-01), Miyake et al.
patent: 2002/0171922 (2002-11-01), Shiraishi et al.
patent: 2003/0081722 (2003-05-01), Kandaka et al.
patent: 2004/0174533 (2004-09-01), Nakauchi
patent: 1 291 680 (2003-03-01), None
patent: 10-070058 (1998-03-01), None
patent: 2002-131489 (2002-05-01), None
patent: 2003-077805 (2003-03-01), None
Taiwanese Office Action (Jun. 24, 2004) w/translation.
2ndInternational Workshop in EUV Lithography Source Oct. 17-19, “At Wavelength Testing of an EUVL Four Mirror Ring Field System” (Goldberg, et al LLBL, UC Berkeley, LLNL) (EUV Alignment and Testing of A 4-Mirror Ring-Field EUV Optical System) (Publication Date: Oct. 17, 2000.
SUB-NM, Figure Error Correction of a Multilayer Mirror by its Surface Milling:, Masaki Yamamoto, Nuclear Instruments and Method in Physics Research A., 467-468 (2001), pp. 1282-1285.
Patent Abstracts of Japan for 2003-077805.
Patent Abstracts of Japan for 2002-131489.
Japanese Patent Office Notice of Reasons for Rejection dated Apr. 19, 2005 with full English Translation.
South Korea Patent Office Notice of Remarks Filing for Korean Counterpart Application 10-2003-0052218 with full English Translation.
English translation of JP 2002-131489.
English translation of JP 2002-077805.
English Abstract of JP 2002-131489.
English Abstract of JP 2003-077805.
Japanese Office Action for Japanese Patent Application No. 2003-281566 dated Nov. 15, 2005.
English translation of Japanese Office Action for counterpart Japanese Patent Application No. 2003-281566.

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