Adjustment arrangement of an optical element

Details Adjustment arrangement of an optical element Adjustment arrangement of an optical element

2008-09-17

2010-02-02

Martinez, Joseph (Department: 2873)

Optical: systems and elements

Lens

With support

C359S824000

Reexamination Certificate

active

07656595

ABSTRACT:
A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).

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