Adjustment arrangement of an optical element

Optical: systems and elements – Lens – With support

Reexamination Certificate

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C359S824000

Reexamination Certificate

active

07457059

ABSTRACT:
A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).

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Tomohiro Hoshino et al. “Improving ArF Lens performance and New generation high NA KrF optical system”,Proceedings of SPIE, vol. 5377, pp. 768-776 (2004).
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