Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-07-18
1993-08-17
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
H01L 4108
Patent
active
052372383
ABSTRACT:
The description relates to an adjusting device 1 for microscopic movements and comprising a carrier element 3 with, fixed on the carrier element 3, drive elements 6a, 6b, 6c which have a piezoelectric transducer which utilises the shear effect and which have a bearing element 5 which rests on the drive elements 6a, b, c. So that such an adjusting device 1, regardless of its position, is able to carry out high-precision reproducible microscopic movements, in particular also movements in a vertical direction being possible while under load, the form and disposition of drive element 6 and bearing element 5 are designed for the performance of a guided microscopic movement. In addition, a pressure applying device 8 is provided which presses the bearing element 5 and the drive element 6 against one another with a predetermined force. Preferably, the pressure applying device comprises at least one magnet 17 which attracts the bearing element 5 with an adjustable force. According to particular embodiments, guided rotary movements are also feasible with the adjusting device according to the invention.
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Berghaus Thomas
Klaede Peter
Budd Mark O.
Dougherty Thomas M.
Lehmann H. Gibner
Lehmann K. Gibner
Omicron Vakuumphysik GmbH
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