Adjusting apparatus for devices and for setting adjustments

Details Adjusting apparatus for devices and for setting adjustments Adjusting apparatus for devices and for setting adjustments

2006-08-01

2006-08-01

Gutierrez, Diego (Department: 2859)

Geometrical instruments

Gauge

Collocating

C033S0010MP, C359S223100, C359S224200

Reexamination Certificate

active

07082693

ABSTRACT:
An apparatus for adjusting devices and for setting adjustments, in particular in a μm range, nm range and below, in particular of optical elements in semiconductor lithography, comprising a base part and a head part spaced apart therefrom, the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or set by a length-adjustment device.

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