Adjustable low profile gimbal system for chemical mechanical pol

Details Adjustable low profile gimbal system for chemical mechanical pol Adjustable low profile gimbal system for chemical mechanical pol

1999-02-09

2000-09-12

Eley, Timothy V.

Abrading

Machine

Rotary tool

451287, 451288, 451398, 384193, 384206, B24B 502, F16C 2504

Patent

active

061169900

ABSTRACT:
A low profile gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. The gimbal system is adjustable so that a preferred balance between stiffness and friction may be selected as appropriate for a variety of different polishing conditions. A locking feature ensures that the adjustment setting is maintained during polishing.

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