Adjustable frog-leg robot

Details Adjustable frog-leg robot Adjustable frog-leg robot

1998-06-05

2000-05-02

Bartuska, F. J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

B25J 1804

Patent

active

060565047

ABSTRACT:
An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position and an extended position, and/or the upper portion may extend between an normal position and a compressed position. The adjusted positions (i.e., extended or compressed) are assumed as the wafer handler moves through a center position. Thus, the inventive wafer handler has a normally smaller arm length (as compared to conventional frog leg configurations) which in turn allows a smaller core axis of rotation (i.e., a smaller bladeless arm length). Therefore the blade used with the adjustable wafer handler may be longer by an amount equal to the difference between the normal and the adjusted arm lengths, without increasing the overall (i.e., the length of the arm and blade) retracted axis of rotation. The longer blade allows wafer placement within a processing chamber without requiring the wafer handler itself to enter the processing chamber.

REFERENCES:
patent: 3757962 (1973-09-01), Chavet
patent: 5085556 (1992-02-01), Ohtomi
patent: 5227708 (1993-07-01), Lowrance
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5584647 (1996-12-01), Uehara et al.
patent: 5713717 (1998-02-01), Cho

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