Adjustable assembly

Details Adjustable assembly Adjustable assembly

2000-02-14

2001-07-10

Mack, Ricky (Department: 2873)

Optical: systems and elements

Lens

With support

C359S822000

Reexamination Certificate

active

06259571

ABSTRACT:

The invention concerns an adjustable assembly according to the preamble of claim
1
and an optical mount as an embodiment of the adjustable assembly.
With the currently known technique for mounting optical elements, for example lenses, production tolerances at the location where the optical element is connected to the mount and in the flange of the mount lead to straining of the optical element when it is fitted in the mount and when the mounted optical element is fitted into a lens system. If in this case the optical element is connected to the flange of the mount in a statically determined manner with the aid of an intermediate ring or inner ring in the form of a three-point mounting, the inevitable tolerances mentioned above lead to tilting of the optical element with respect to the optical axis.
DD 278 207 A1 discloses an adjusting device for an optical element by which the optical axes of individual optical elements can be aligned with respect to the mechanical axis of a lens system. However, the adjusting elements cannot be used to correct deviations of the optical axes of optical elements from the axis of the lens system with the high accuracy demanded today, as required for example for objects in semiconductor lithography.
JP 10-54 932 shows a connection for a mount with a lever reduction gear in a multi-part configuration.
In U.S. Pat. No. 5,428,482 there is described a connection between a mount and an inner ring on which a lens is mounted as the optical element, the connection taking place by solid pivoting joints arranged such that they are distributed around the circumference.
The present invention is based on the object of providing a stress-isolated assembly, in particular for the technique of mounting an optical element, in which an adjustable part tilted due to production and installation tolerances, such as for example a lens as an optical element, can be tilted back into the desired position by a drive or manipulators.
This object is achieved according to the invention by the features stated in the defining part of claim
1
.
An embodiment or a possible application for the adjustable assembly is presented in claim
3
.
The solution according to the invention allows a very high transmission ratio to be achieved to a fine degree by the drive in a very small space for the adjustable part, for example an optical element. This takes place by one of the two solid pivoting joints been divided into two pivoting joint parts, which are arranged such that along their pivoting axis they are offset sideways on either side of the second solid pivoting joint. In this way, the distance between the solid pivoting joints which determines the transmission ratio can be significantly reduced.
In particular when used as an optical mount, x/z directional transformations can be produced in this way with a correspondingly great transmission ratio and a resultant high accuracy, this taking place by means of a space-saving construction adapted to the space conditions in the mount ring.


REFERENCES:
patent: 4514039 (1985-04-01), Kawai
patent: 5428482 (1995-06-01), Bruning et al.
patent: 6091554 (2000-07-01), Sharp et al.
patent: 278 207 A1 (1988-12-01), None
patent: 10-54932 (1996-08-01), None

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