Adhesive with differential optical properties and its...

Details Adhesive with differential optical properties and its... Adhesive with differential optical properties and its...

2008-05-22

2009-06-30

Tucker, Philip C (Department: 1791)

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C156S067000, C156S247000, C156S272200, C156S345420, C252S301160, C252S301340, C252S960000, C524S087000, C524S088000, C524S089000, C524S090000, C524S110000, C525S351000, C525S374000, C526S075000, C526S204000, C526S209000, C526S213000, C526S215000, C526S266000, C526S280000, C526S326000, C526S268000, C526S269000, C526S270000, C526S271000

Reexamination Certificate

active

07553386

ABSTRACT:
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.

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