Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1994-09-06
1995-11-14
Berman, Jack L.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250307, H01J 3726
Patent
active
054669375
ABSTRACT:
A method of forming an image in an electron microscope. Because of the oscillating behaviour of the phase contrast transfer function (PCTF), images made by means of an electron microscope are liable to exhibit contrast whereas the object does not exhibit such contrast. In order to counteract these deviations, it is proposed to form sub-images, each sub-image having its own defocusing of the imaging lens and each sub-image being formed with its own weighting factor, and to add said sub-images. A substantially flat variation of the PCTF is achieved by imparting an oscillating dependence as a function of the defocusing to the weighting factor. The invention offers a simple method of image reconstruction from the sub-images in that the value of the oscillating function has the same sign throughout the defocusing range. The desired image can then be obtained by addition of the sub-images on, for example a photographic film.
REFERENCES:
patent: 4514629 (1985-04-01), Smith et al.
patent: 5134288 (1992-07-01), Van Dyjk et al.
Y. Tanigushi et al, "Active Image Processing as Applied to High Resolution Electron Microscopy [I] Assessment of Misalignment and its Correction", J. Electron Microsc., vol. 39, No. 3, 1990, pp. 137-144.
P. Bonhomme & A. Beorchia, "Image Synthesis In The Electron Microscope", Ultramicroscopy 17, 1985, pp. 127-131.
Berman Jack L.
Miller Paul R.
U.S. Philips Corporation
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